In 1800 the arrondissements of Corbeil and Étampes were established as part of the department Seine-et-Oise. The arrondissement of Étampes was disbanded in 1926. The arrondissement of Palaiseau was created in 1962. In 1966 the arrondissement of Corbeil was disbanded, Étampes was restored, and Évry was created.[2] In 1968 the department Seine-et-Oise was disbanded, and the arrondissements of Évry, Étampes and Palaiseau became part of the new department Essonne.[3]
In January 2017 three communes passed from the arrondissement of Étampes to the arrondissement of Palaiseau.[4]