Etch pit density

The etch pit density (EPD) is a measure for the quality of semiconductor wafers.[1][2]

Etching

An etch solution is applied on the surface of the wafer where the etch rate is increased at dislocations of the crystal resulting in pits. For GaAs one uses typically molten KOH at 450 degrees Celsius for about 40 minutes in a zirconium crucible. The density of the pits can be determined by optical contrast microscopy. Silicon wafers have usually a very low density of < 100 cm−2 while semi-insulating GaAs wafers have a density on the order of 105 cm−2.

Germanium detectors

High-purity Germanium detectors require the Ge crystals to be grown with a controlled range of dislocation density to reduce impurities. The etch pitch density requirement is typically within the range 103 to 104 cm−2.[citation needed]

Standards

The etch pit density can be determined according to DIN 50454-1 and ASTM F 1404.[3]

References

  1. ^ Zhuang, D.; Edgar, J.H. (2005). "Wet etching of GaN, AlN, and SiC: a review". Materials Science and Engineering: R: Reports. 48 (1): 1–46. doi:10.1016/j.mser.2004.11.002. ISSN 0927-796X.
  2. ^ Klaus Graff (8 March 2013). Metal Impurities in Silicon-Device Fabrication. Springer Science & Business Media. pp. 152–. ISBN 978-3-642-97593-6.
  3. ^ J. Doneker; I. Rechenberg (1 January 1998). Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997. CRC Press. pp. 248–. ISBN 978-0-7503-0500-6.
Stub icon

This standards- or measurement-related article is a stub. You can help Wikipedia by expanding it.

Read other articles:

SMK Negeri 1 Cikampek

SMK Negeri 1 Cikampek[1]InformasiDidirikan1999[2]JenisNegeri[3]AkreditasiSemua program keahlian terakreditasi A[4]Nomor Pokok Sekolah Nasional20217803 [5]Kepala SekolahDrs. Makmur, M.T[6]Ketua KomiteDrs. Soleh Supriyatna, SH[7]Jumlah kelas38 kelas[8]Jurusan atau peminatan Teknik Kendaraan Ringan dan Otomotif Teknik Pemesinan[9] Teknik Elektronika Industri Teknik Instalasi Tenaga Listrik Teknik Otomasi Indus...

 

Южноиндийская раса

Информация в этой статье или некоторых её разделах устарела. Вы можете помочь проекту, обновив её и убрав после этого данный шаблон. Эту статью нужно проверить на соответствие критериям взвешенности изложения. Возможно, содержание статьи нарушает принцип взвешенного из...

 

Maria Anna Mozart

Austrian musician (1751–1829) This article is about the sister of Wolfgang Amadeus Mozart. For his mother, see Anna Maria Mozart. Marianne Mozart and Nannerl redirect here. For her cousin of the same name, see Maria Anna Thekla Mozart. For the American political theorist, see Nannerl O. Keohane. Maria Anna MozartMaria Anna Mozart, c. 1785Born(1751-07-30)30 July 1751Salzburg, Archbishopric of Salzburg, Holy Roman EmpireDied29 October 1829(1829-10-29) (aged 78)Salzburg, Austrian Em...

Itinérance (téléphonie)

Symbole de roaming affiché dans la barre de notification d'un smartphone Android. L’itinérance ou roaming (anglicisme) est la faculté pour l'abonné d'un réseau de téléphonie mobile de pouvoir téléphoner et échanger des données via le réseau de téléphonie mobile d'un autre opérateur, aussi bien pour un appel entrant que pour un appel sortant. Le roaming et le handover sont deux caractéristiques fondamentales des réseaux mobile de types GSM, UMTS, LTE ou 5G, définies par les...

 

Boeing 929

Boeing 929 Jetfoil adalah nama untuk desain hydrofoil pembawa penumpang waterjet propelled oleh Boeing.[1][2][3] Boeing mulai mengadaptasi banyak sistem yang digunakan dalam pesawat jet untuk hidrofoil. Robert Bateman memimpin pengembangan. Boeing meluncurkan hidrofoil bertenaga jet air pertama yang membawa penumpang pada April 1974. Pesawat ini dapat mengangkut 167 hingga 400 penumpang. Itu didasarkan pada teknologi yang sama yang dipelopori oleh hidrofoil patroli Tu...

 

Balloon Brothers

An editor has nominated this article for deletion.You are welcome to participate in the deletion discussion, which will decide whether or not to retain it.Feel free to improve the article, but do not remove this notice before the discussion is closed. For more information, see the guide to deletion.Find sources: Balloon Brothers – news · newspapers · books · scholar · JSTOR%5B%5BWikipedia%3AArticles+for+deletion%2FBalloon+Brothers%5D%5DAFD 1992 video g...

Crazy Sue Goes On

1992 Commodore Amiga video game 1992 video gameCrazy Sue Goes OnPublisher(s)MC PublicationsDesigner(s)Hironymus JumpshoeArtist(s)DJ BraincrackComposer(s)MC Mad BrushPlatform(s)AmigaRelease1992Genre(s)PlatformMode(s)Single-player Crazy Sue Goes On, also known as Crazy Sue 2 and Crazy Sue II, is a 2D platform game for the Amiga which is the sequel to Crazy Sue, in which the player again takes the role of the little girl named Crazy Sue, and must defeat the wife of the evil Wizard of Doom whom s...

 

Pornainen

PornainencomunePornaisten kunta Pornainen – Veduta LocalizzazioneStato Finlandia Regione Uusimaa DistrettoHelsinki AmministrazioneSindacoHannu Haukkasalo Data di istituzione1869 TerritorioCoordinate60°28′35″N 25°22′30″E / 60.476389°N 25.375°E60.476389; 25.375 (Pornainen)Coordinate: 60°28′35″N 25°22′30″E / 60.476389°N 25.375°E60.476389; 25.375 (Pornainen) Superficie150,05 km² Abitanti5 011[1] (31-12-2022...

 

Archaeal transcription

Part of a series onGenetics Key components Chromosome DNA RNA Genome Heredity Nucleotide Mutation Genetic variation Allele Amino acid Outline Index History and topics Introduction History Evolution (molecular) Population genetics Mendelian inheritance Quantitative genetics Molecular genetics Research Geneticist DNA sequencing Genetic engineering Genomics ( template) Medical genetics Branches of genetics Fields Classical Conservation Cytogenetics Ecological Immunogenetics Microbial Molecular P...

يوسف إدريس

يوسف إدريس معلومات شخصية اسم الولادة يوسف إدريس علي الميلاد 19 مايو 1927(1927-05-19)فاقوس، محافظة الشرقية، المملكة المصرية الوفاة 1 أغسطس 1991 (64 سنة)لندن، المملكة المتحدة سبب الوفاة نوبة قلبية  الجنسية  مصر الزوجة رجاء الرفاعي الأولاد سامح، بهاء (متوفي)، نسمة الحياة العملية ال...

 

Enrique Hernández (baseball)

Puerto Rican baseball player (born 1991) In this Spanish name, the first or paternal surname is Hernández and the second or maternal family name is González. Baseball player Enrique HernándezHernández with the Los Angeles Dodgers in 2018Los Angeles Dodgers – No. 8Utility playerBorn: (1991-08-24) August 24, 1991 (age 32)San Juan, Puerto RicoBats: RightThrows: RightMLB debutJuly 1, 2014, for the Houston AstrosMLB statistics (through April 16, 2024)Batting avera...

 

La Garenne-Colombes

This article has multiple issues. Please help improve it or discuss these issues on the talk page. (Learn how and when to remove these template messages) This article may require copy editing for grammar, style, cohesion, tone, or spelling. You can assist by editing it. (June 2023) (Learn how and when to remove this message) This article needs additional citations for verification. Please help improve this article by adding citations to reliable sources. Unsourced material may be challenged a...

Stefan Wyszyński

Polish Roman Catholic cardinal (1901–1981) This article needs additional citations for verification. Please help improve this article by adding citations to reliable sources. Unsourced material may be challenged and removed.Find sources: Stefan Wyszyński – news · newspapers · books · scholar · JSTOR (December 2023) (Learn how and when to remove this message) In this article, the surname is Wyszyński, not Wyszynski. BlessedStefan WyszyńskiCardinalA...

 

صخرة الحسيمة

Peñón de Alhucemasصخرة الحسيمة صخرة الحسيمة تقسيم إداري البلد المغرب ، إسبانيا (متنازع عليها)[1] التقسيم الأعلى مليلية[2]  خصائص جغرافية إحداثيات 35°12′49″N 3°53′22″W / 35.2135°N 3.8895°W / 35.2135; -3.8895   المساحة 0,046 كم² كم² الارتفاع 27 متر  السكان التعداد السكاني 60 نسمة...

 

Sexuality in the United States

Overview of sexuality in the United States This article's lead section may be too short to adequately summarize the key points. Please consider expanding the lead to provide an accessible overview of all important aspects of the article. (January 2022) Sexuality in the United States varies by region and time period. History During the Victorian era, romance was increasingly viewed as a key component of sexuality.[1] One study of the interwar period suggests that prudish attitudes were...

Chupacabra

Legendary creature in American folklore For other uses, see Chupacabra (disambiguation). ChupacabraAn artist's rendition of the chupacabraFirst attestedMarch 1995Other name(s)Chupacabras, El ChupacabraCountryPuerto RicoMexicoUnited StatesRegionCaribbean (chiefly Puerto Rico)Central and South AmericaNorth America (chiefly Mexico and the southwestern United States) Part of a series on theParanormal Main articles Astral projection Astrology Aura Bilocation Breatharianism Clairvoyance Close encou...

 

Milwaukee Journal Sentinel

Newspaper based in Milwaukee, Wisconsin This article needs additional citations for verification. Please help improve this article by adding citations to reliable sources. Unsourced material may be challenged and removed.Find sources: Milwaukee Journal Sentinel – news · newspapers · books · scholar · JSTOR (October 2019) (Learn how and when to remove this message) Milwaukee Journal SentinelFront page of the Milwaukee Journal SentinelTypeDaily newspaper...

 

Wrightsville Beach, North Carolina

Town in North Carolina, United StatesWrightsville Beach, North CarolinaTownWrightsville Beach shoreline seen from Crystal Pier FlagSealLocation in New Hanover County and the state of North Carolina.Coordinates: 34°12′41″N 77°47′47″W / 34.21139°N 77.79639°W / 34.21139; -77.79639CountryUnited StatesStateNorth CarolinaCountyNew HanoverTownshipHarnett TownshipNamed forJoshua G. WrightGovernment • MayorDarryl Mills[1]Area[2] •...

الدوري البحريني الممتاز 1972–73

هذه المقالة تحتاج للمزيد من الوصلات للمقالات الأخرى للمساعدة في ترابط مقالات الموسوعة. فضلًا ساعد في تحسين هذه المقالة بإضافة وصلات إلى المقالات المتعلقة بها الموجودة في النص الحالي. (يناير 2018) الدوري البحريني الممتاز 1972–73معلومات عامةالرياضة كرة القدم البطولة الدوري الب...

 

Oribasio

Commentaria in Aphorismos Hippocratis, 1533 Oribasio di Pergamo (Pergamo, 325 – 403) è stato un medico e scrittore greco antico. Indice 1 Biografia 2 Opere 2.1 Collectiones medicae 2.2 I Compendi 3 Importanza e fortuna di Oribasio 4 Note 5 Bibliografia 6 Voci correlate 7 Altri progetti 8 Collegamenti esterni Biografia Oribasio, nato a Pergamo nel 325 e morto a Bisanzio nel 403, medico e scrittore dell'impero romano, è stato il più influente tra i medici greci post-galenici. Proveniva da ...