Litografia por feixe de elétrons

Litografia por feixe de elétrons (frequentemente abreviada na literatura em língua inglesa como e-beam lithography) é a prática de varrer com um feixe de elétrons em um padrão através de uma superfície coberta com um filme (chamado nesta área de atividade resiste),[1][2] ("expondo" o resiste) e de remover seletivamente ou regiões expostas ou não expostas do resiste ("desenvolvimento"). O propósito, assim como com fotolitografia, é a criação de estruturas muito pequenas no resiste que podem posteriormente ser transferidas para o substrato material, muitas vezes por decapagem. Ele foi desenvolvido para a fabricação de circuitos integrados, e é também usado para criar arquiteturas nanotecnológicas.

Referências

  1. McCord, M. A.; M. J. Rooks (2000). «2». SPIE Handbook of Microlithography, Micromachining and Microfabrication. [S.l.: s.n.] 
  2. Antonio C. Seabra; Litografia para Microeletrônica - www.lsi.usp.br

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