Mask inspection

In microtechnology, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomasks, used, e.g., for semiconductor device fabrication.[1]

Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.[2]

Mask data inspection

The term "mask inspection" may also informally refer to mask data inspection step performed before actual writing the real mask.[3] Other methods of inspection use specially constructed light microscope systems such as are available from Probing Solutions Inc. These rely on white light, typically optimized at approximately 538 nM and use incident bright and dark field as well as transmitted bright and dark field illumination to see pin holes, edge defects and many forms of contamination and substrate defects.

References

  1. ^ "VLSI technology: fundamentals and applications", by Yasuo Tarui, 1986, ISBN 3-540-12558-2, Chapter 4: "Mask Inspection Technology"
  2. ^ ZEISS Webpage offering automated mask repair tools
  3. ^ "Design for manufacturability and yield for nano-scale CMOS", by Charles Chiang, Jamil Kawa, 2007, ISBN 1-4020-5187-5, p. 237


Stub icon

This electronics-related article is a stub. You can help Wikipedia by expanding it.

Read other articles:

Wahyu 3

Wahyu 3Wahyu 3:19-4:3 pada fragmen Uncial 0169 dari abad ke-4 M.KitabKitab WahyuKategoriApokalipsBagian Alkitab KristenPerjanjian BaruUrutan dalamKitab Kristen27← pasal 2 pasal 4 → Wahyu 3 (disingkat Why 3) adalah bagian dari Wahyu kepada Yohanes, kitab terakhir dalam Perjanjian Baru di Alkitab Kristen.[1][2] Pengarangnya diyakini adalah Yohanes bin Zebedeus, seorang dari Keduabelas Rasul Yesus Kristus.[3][4][5] Teks Naskah aslinya ditulis d...

 

جون بوفورت (إيرل سومرست الأول)

جون بوفورت، إيرل سومرست الأول (بالإنجليزية: John Beaufort)‏  شعار إيرل ودوقات عائلة بوفورت وصي العرش هنري بوفورت، إيرل سومرست الثاني معلومات شخصية الميلاد 1373شاتيو دي بوفورت، أنجو الوفاة 16 مارس 1410(1410-03-16) (عمره 36/37) مكان الدفن كاتدرائية كانتربري  مواطنة مملكة إنجلترا  الزو�...

 

Miyoshi, Hiroshima

Letak Miyoshi di Prefektur Hiroshima Miyoshi (三次市code: ja is deprecated , Miyoshi-shi) adalah kota yang terletak di bagian utara dari Prefektur Hiroshima, Jepang. Kota ini didirikan pada 31 Maret 1954. Pada 1 April 2004, kota Miyoshi disatukan dengan kota kecil Kisa, Mirasaka, Miwa, dan desa Funo, Kimita, dan Sakugi dari Distrik Futami dan dari kota kecil Kōnu di Distrik Kōnu untuk membentuk kota baru Miyoshi. Karena penggabungan ini Distrik Futami menjadi hilang. Menurut data Aril 20...

Korean immigration to Hawaii

1903 to present immigration This article has multiple issues. Please help improve it or discuss these issues on the talk page. (Learn how and when to remove these template messages) This article may require cleanup to meet Wikipedia's quality standards. The specific problem is: Repetitive, language is emotionally charged and needs to be made more neutral, needs more citations. Please help improve this article if you can. (April 2023) (Learn how and when to remove this template message) This a...

 

1940 United States presidential election in North Carolina

Main article: 1940 United States presidential election 1940 United States presidential election in North Carolina ← 1936 November 5, 1940[1] 1944 → All 13 North Carolina votes to the Electoral College   Nominee Franklin D. Roosevelt Wendell Willkie Party Democratic Republican Home state New York New York Running mate Henry A. Wallace Charles L. McNary Electoral vote 13 0 Popular vote 609,015 213,633 Percentage 74.03% 25.97% County Result...

 

Bell's palsy

Facial paralysis resulting from dysfunction in the cranial nerve VII (facial nerve) Medical conditionBell's palsyA person attempting to show his teeth and raise his eyebrows with Bell's palsy on his right side. Note how the forehead is not spared.SpecialtyNeurology, ENT, oral and maxillofacial surgerySymptomsInability to move the facial muscles on one side, change in taste, pain around the ear[1]Usual onsetOver 48 hours[1]Duration< 6 months[1]CausesUnknown[...

Yamashita Station (Hyōgo)

Railway station in Kawanishi, Hyōgo Prefecture, Japan Yamashita Station山下駅Yamashita Station, December 2006General informationLocation2-24 Mino, Kawanishi-shi, Hyōgo-ken 666-0105JapanCoordinates34°53′35.58″N 135°24′45.32″E / 34.8932167°N 135.4125889°E / 34.8932167; 135.4125889Operated by Nose Electric RailwayLine(s)■ Myōken Line ■ Nissei Line Distance8.2 km (5.1 mi) from Kawanishi-NoseguchiPlatforms1 island + 2 side platformsConnection...

 

Helmut Mahlke

This article needs additional citations for verification. Please help improve this article by adding citations to reliable sources. Unsourced material may be challenged and removed.Find sources: Helmut Mahlke – news · newspapers · books · scholar · JSTOR (August 2016) (Learn how and when to remove this template message) Helmut MahlkeMahlke aboard Bayern in 1966Born27 August 1913BerlinDied26 December 1998(1998-12-26) (aged 85)HeikendorfAllegiance&#...

 

Heaven (Cosmic Baby album)

1999 studio album by Cosmic BabyHeavenStudio album by Cosmic BabyReleased1999Recorded1998GenreTechno, trance, house, chill-out, electro, Balearic beat, breakbeatLength77:19LabelIntercordCosmic Baby chronology Fourteen Pieces(1996) Heaven(1999) Die Toteninsel(2006) Heaven is a music album by techno/trance artist Cosmic Baby which was released in 1999. It is Cosmic Baby's fourth full-length album. It was his final album before his break from recording as Cosmic Baby, as well as his fina...

Battle of Varna

Battle in the Crusade of Varna This article needs additional citations for verification. Please help improve this article by adding citations to reliable sources. Unsourced material may be challenged and removed.Find sources: Battle of Varna – news · newspapers · books · scholar · JSTOR (July 2008) (Learn how and when to remove this message) Battle of VarnaPart of the Crusade of Varna and the Ottoman wars in EuropeThe Crusaders were trapped below. Thei...

 

Legal financing

Example of litigation financing process Legal financing (also known as litigation financing, professional funding, settlement funding, third-party funding, third-party litigation funding (TPLF), legal funding, lawsuit loans and, in England and Wales, litigation funding) is the mechanism or process through which litigants (and even law firms) can finance their litigation or other legal costs through a third party funding company. Similar to legal defense funds, legal financing companies provid...

 

2020年夏季奥林匹克运动会阿尔及利亚代表团

2020年夏季奥林匹克运动会阿尔及利亚代表團阿尔及利亚国旗IOC編碼ALGNOC阿爾及利亞奧林匹克委員會網站www.coa.dz（法文）2020年夏季奥林匹克运动会（東京）2021年7月23日至8月8日（受2019冠状病毒病疫情影响推迟，但仍保留原定名称）運動員41參賽項目14个大项旗手开幕式：穆罕默德·弗利希（拳击）和阿梅爾·梅利（英语：Amel Melih）（游泳）[1]闭幕式：伊曼·哈利夫（拳�...

Project National Glory

Republic of China plan to reconquer mainland China from the People's Republic of China For the Chinese supermarket chain called Guoguang, see Guoguang (Jiangxi). Project National Glory國光計劃TypeInvasionLocationTaiwan StraitPlanned byChiang Kai-shekCommanded byChiang Kai-shekObjectiveReconquer mainland China from the People's Republic of ChinaDate1 April 1961 – 20 July 1972Executed byRepublic of China Armed ForcesCasualties>300 killed Project National GloryTraditional...

 

Henri Rey (homme politique)

Pour les articles homonymes, voir Rey et Henri Rey. Henri Rey Fonctions Membre du Conseil constitutionnel 3 mars 1971 – 12 octobre 1977 (6 ans, 7 mois et 9 jours) Prédécesseur Jules Antonini Successeur Louis Joxe Secrétaire d'Etat chargé Départements et Territoires d'Outre-mer 22 juin 1969 – 25 février 1971 (1 an, 8 mois et 3 jours) Président Georges Pompidou Gouvernement Jacques Chaban-Delmas Prédécesseur Michel Inchauspé Successeur Pierre Messmer...

 

236-я гвардейская артиллерийская бригада

236-я гвардейская артиллерийская бригада Годы существования 1 декабря 2017[1] — н. в. Страна  Россия Подчинение Сухопутные войска Входит в 20-я гвардейская общевойсковая армия Тип артиллерийская бригада Функция ствольная артиллерияреактивная артиллерия Часть Моск...

Maxim (musician)

English musician MaximMaxim on tour in Washington, D.C., 2007Background informationBirth nameKeith Andrew PalmerAlso known asMaxim RealityBorn (1967-03-21) 21 March 1967 (age 57)Peterborough, EnglandGenresBig beatbreakbeattrip hopInstrument(s)VocalsMember ofThe ProdigyMusical artist Keith Andrew Palmer (born 21 March 1967),[1] better known by his stage name Maxim (previously Maxim Reality), is an English musician, known for being a vocalist of electronic music band the Prodigy. P...

 

Nokia Asha 210

Mobile phone model For the Nokia 210 (2019) model made by HMD Global, see Nokia 210 (2019). Nokia Asha 210BrandNokiaManufacturerNokiaSloganLife that's worth sharingSeriesAshaFirst releasedApril 2013PredecessorNokia Asha 200/201, Nokia Asha 302SuccessorNokia Asha 500RelatedNokia Asha 205DimensionsHeight: 111.5 mmWidth: 60 mmThickness: 11.8 mmMass100 gOperating systemNokia Series 40Memory32 MB RAM, 64 MB ROMRemovable storageMicro SD card up to 32GBBatteryLi-Ion (BL-4U)Capicity: 1200 mAhDisplayD...

 

جورج إليس

جورج إليس معلومات شخصية الميلاد 7 سبتمبر 1932   ساوث شيلدز  [لغات أخرى]‏  تاريخ الوفاة 17 يناير 2023 (90 سنة) [1]  الجنسية المملكة المتحدة  الحياة العملية المهنة منافس ألعاب قوى  الرياضة ألعاب القوى  تعديل مصدري - تعديل   جورج إليس (بالإنجليزية: George Ellis)‏ �...

Mercusuar Kupang

Artikel ini sebatang kara, artinya tidak ada artikel lain yang memiliki pranala balik ke halaman ini.Bantulah menambah pranala ke artikel ini dari artikel yang berhubungan atau coba peralatan pencari pranala.Tag ini diberikan pada Oktober 2022. Mercusuar Kupang Mercusuar Kupang, Mercusuar Koepang atau Mercusuar Benteng Concordia adalah sebuah mercusuar yang terletak di Kupang, Nusa Tenggara Timur. Mercusuar tersebut memiliki ketinggian 13 meter dan lingkar 25 meter. Mercusuar tersebut berbent...

 

Lambang Warsawa

Lambang Besar Warsawa Lambang Warsawa Lambang kota Warsawa bentuk berupa syrenka (putri duyung kecil) pada sebuah latar belakang berwarna merah. Kata syrenka dalam bahasa Polandia sering diterjemahkan menjadi siren dalam bahasa Inggris, tetapi sebenarnya lebih cocok disebut putri duyung air tawar yang memiliki nama Melusina. Pada lambang pertama Warsawa, pada awalnya ada gambar seekor naga yang memiliki kepala manusia lelaki, membawa pedang dan perisai. Lambang pertama ini dipakai untuk perta...