Lord Carew married, on 16 November 1816, Jane Catherine Cliffe (1798–1901), daughter of Major Anthony Cliffe and Frances Deane. They had three sons and a daughter:
Lord Carew died in June 1856, aged 69, and was succeeded in his titles by his eldest son Robert. Lady Carew died at Woodstown, County Waterford 12 November 1901, aged 103.[2]