MKS Instruments was founded in 1961 as a provider of products and technologies used to measure, control, power, and monitor critical process parameters of advanced manufacturing processes.[3]
In 2001, the company acquired Emerson Electric's ENI Division which makes solid-state RF and DC plasma power supplies, networks and instruments.[4][5]
In April 2014, Brooks Automation entered into an agreement to sell its Granville-Phillips division to MKS Instruments.[6] MKS Instruments more than doubled their addressable market by acquiring the Newport Corporation and its subsidiaries, including Ophir Optronics, for $980 million in a 2016 leveraged buyout.[7] It acquired Electro Scientific Industries in 2019,[8] and Atotech in 2021.[9]
In 2021, MKS Instruments had about 5,400 employees and a market capitalization of about $11 billion.[10] As of 2021, sixty percent of the company's sales are from semiconductor products.[11] On February 3, 2023, MKS Instruments fell victim to a ransomware attack that among others shut down their websites for more than ten days.[12]